The Nikkei 225 Index jumped 1.2 percent to 33,982.36, while the broader Topix Index settled 0.9 percent higher at 2,488.51.
Nvidia supplier Advantest surged 4.9 percent, fellow chip-equipment maker Tokyo Electron added 1.4 percent and Screen Holdings rallied 3.9 percent.
Japan said over the weekend it wasn't planning to use its U.S. Treasury holdings as a negotiating tool to counter U.S. tariffs.
Japan's industrial production rebounded in February but at a slower than initially estimated pace, final data from the Ministry of Economy, Trade and Industry showed on Monday.
Industrial production grew 2.3 percent month-on-month in February, reversing January's 1.1 percent decline. On a yearly basis, industrial production gained 0.1 percent.
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